A low-voltage three-axis electromagnetically actuated micromirror for fine alignment among optical devices

In this paper, a new three-axis electromagnetically actuated micromirror structure has been proposed and fabricated. It is electromagnetically actuated at low voltage using an external magnetic field. The main purpose of this work was to obtain a three-axis actuated micromirror in a mechanically robust structure with large static angular and vertical displacement at low actuation voltage for fine alignment among optical components in an active alignment module as well as conventional optical systems. The mirror plate and torsion bars are made of bulk silicon using a SOI wafer, and the actuation coils are made of electroplated Au. The maximum static deflection angles were measured as ±4.2◦ for x-axis actuation and ±9.2◦ for y-axis actuation, respectively. The maximum static vertical displacement was measured as ±42 μm for z-axis actuation. The actuation voltages were below 3 V for all actuation. The simulated resonant frequencies are several kHz, and these imply that the fabricated micromirror can be operated in sub-millisecond order. The measured radius of curvature (ROC) of the fabricated micromirror is 7.72 cm, and the surface roughness of the reflector is below 1.29 nm which ensure high optical performance such as high directionality and reflectivity. The fabricated micromirror has demonstrated large actuated displacement at low actuation voltage, and it enables us to compensate a larger misalignment value when it is used in an active alignment module. The robust torsion bar and lifting bar structure formed by bulk silicon allowed the proposed micromirror to have greater operating stability. The additional degree of freedom with z-axis actuation can decrease the difficulty in the assembly of optical components and increase the coupling efficiency between optical components. (Some figures in this article are in colour only in the electronic version)